Zygo ZMI-4004 8020-0102-02

Zygo ZMI-4004 Overview

The Zygo ZMI-4004 is a 4-axis VME64x measurement board in the Zygo ZMI series, designed for high-precision displacement and distance measurement. It is widely used in semiconductor manufacturing, optical fabrication, and scientific research applications that demand sub-nanometer resolution.

This board adopts the 6U VME electronic format, supports simultaneous 4-axis measurement, and offers a resolution of up to 0.15 nm. It achieves a maximum velocity of ±2.55 m/s, a data rate of 10 MHz, and a data age uncertainty of only ±0.1 ns. With built-in error compensation, the ZMI-4004 can seamlessly interface with Zygo laser heads such as 7712 and 7702, as well as the ZMI series interferometers.

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Technical Highlights

Feature	Description
Electronic Platform	6U VME64x, compatible with standard high-speed VME bus
Axes	4 axes per board, ideal for compact multi-axis integration
Resolution	0.31 nm (single-channel), 0.15 nm (dual-channel)
Velocity	5.1 m/s (single-channel), 2.55 m/s (dual-channel)
Data Rate	10 MHz; supports both parallel VME and high-speed serial formats
Error Compensation	Built-in cyclic error compensation for improved dynamic accuracy
Compatible Laser Heads	Zygo 7712, 7702, 7714, 7724, etc.

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Typical Applications

• Semiconductor Lithography & Etching – Provides high-resolution displacement feedback to improve overlay accuracy.
• Precision Manufacturing & Metrology – Enables sub-nanometer positioning for optical components and MEMS fabrication.
• Scientific Research – Suitable for ultra-precise motion stages and nanopositioning experimental setups.

Main Brand:

ABB    Allen-Bradley     Alstom  Bently       Emerson     Foxboro

GE      MOOG     Schneider     Woodward     HIMA      Honeywell

First hand source, affordable price. Spot inventory!

•Shipping Port: Xiamen

•Ship to you via Fedex/DHL/TNT/UPS/EMS

•Package: Original packing with cartons

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Frequently Asked Questions (FAQ)

Delivery & Shipping

Q: What is the earliest time you can make delivery?
A: Delivery is processed immediately upon receipt of payment.

Returns & Warranty

Q: If the product doesn’t work, can it be returned?
A: Yes, we provide a one-year warranty for all products.

Product Availability

Q: How easy is it to obtain items?
A: These items are no longer in continuous production, making supply limited. However, XingRuijia specializes in sourcing hard-to-find products. While lead times vary, the average delivery window is 5-7 business days.

Pricing

Q: What is the typical price for the items?
A: XingRuijia offers highly competitive pricing while maintaining excellent service. Final pricing may vary based on delivery requirements and availability.